deep reactive-ion etching

highly anisotropic etch process

en-GB/ˈdiːp ɹiːæktɪv - ˈaɪən ˈɛt͡ʃɪŋ/
en-US/ˈdip ɹiˈæktɪv - ˈaɪˌɑn ˈɛt͡ʃɪŋ/

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technologyetching